Diagnostics of Diamond Film Deposition Plasmas
Abstract
Diagnostic methods were developed and applied toward understanding the gas phase processes occurring in diamond film deposition plasmas. Diagnostics were applied in plasma arcjet environments, hot filament systems and in radio frequency plasma systems. The diagnostic methods included optical emission spectroscopy, surface Raman spectroscopy, scanning electron microscopy, laser-induced fluorescence, and surface analysis by laser ionization. The parameters that were measured included radical concentrations and temperatures, ground-state and excited-state temperatures of C2 and CH molecules, electron temperatures and energy distribution functions, ion densities, and the observation of acetylene and other hydrocarbon species. Some modeling and comparison of experimental results to model predictions were also performed.... Diamond deposition plasmas, Diagnostics, Laser induced fluorescence, Optical emission spectroscopy, Mass spectroscopy, Langmuir probes.
Document Details
- Document Type
- Technical Report
- Publication Date
- Nov 01, 1992
- Accession Number
- ADA260866
Entities
People
- Jay. B. Jeffries
- Kenneth R. Stalder
Organizations
- SRI International