Research on Lead Titanate Films for Radiation Detection
Abstract
The objectives of the contract were to prepare thin films of PbTiO3, measure their properties and determine their performance for pyroelectric detection of infrared and millimeter-wave (94 GHz) radiation. Thin films of PbTiO3 were deposited on silicon microstructures consisting of Si3N4 membranes over etch pits in silicon substrates. Upper and lower Pt electrodes formed electrical contacts to the PbTiO3 pyroelectric films. Aluminum metallizations in the form of full-wave and half-wave dipoles contacting the PbTiO3 pixels were developed for detection of 94 GHz radiation. Infrared detection was by direct absorption in the PbTiO3 pixel. Two process runs incorporating single pixels and linear arrays were carried out and the results described.... Lead titanate, Thin films, Pyroelectric array, Infrared detection, Millimeter wave detection.
Document Details
- Document Type
- Technical Report
- Publication Date
- Nov 04, 1992
- Accession Number
- ADA261187
Entities
People
- Barrett E. Cole
- Paul W. Kruse
- Robert D. Horning
Organizations
- Honeywell International, Inc.