State-Selected Studies of Atoms and Molecules Ejected From Ion Bombarded Surfaces

Abstract

A fundamental understanding of the essential physics which contributes to the formation of secondary ions requires a global view of the energy transfer processes which occur subsequent to the ion bombardment event. Many different pathways are known which must contribute to this global view including the desorption of ground state and excited state neutral atoms, desorption of molecules and clusters in various rotation and vibrational excited states, and desorption of species induced by electronic transitions. In many experimental configurations the SIMS component is a minor fraction of the total possible energy-loss pathways.... SIMS, Energy and angular neutral distributions, LEED and Auger spectroscopy.

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Document Details

Document Type
Technical Report
Publication Date
Jan 01, 1993
Accession Number
ADA261275

Entities

People

  • Nicholas Winograd

Organizations

  • Pennsylvania State University

Tags

Communities of Interest

  • Energy and Power Technologies

DTIC Thesaurus Topics

  • Chemistry
  • Crystals
  • Desorption
  • Electrons
  • Ground State
  • Ion Bombardment
  • Ionization
  • Ionizing Radiation
  • Kinetic Energy
  • Mass Spectra
  • Mass Spectrometry
  • Measurement
  • New York
  • Spectra
  • Spectrometry
  • Spectroscopy
  • Universities

Fields of Study

  • Physics

Readers

  • Molecular Photonics/Laser Physics
  • Thin Film Deposition Science.

Technology Areas

  • Microelectronics