Frequency Trimming Technique for Surface Acoustic Wave Devices

Abstract

Currently, there is an in-house effort to produce a vibration- insensitive surface acoustic wave (SAW) resonator to stabilize the outputs of state-of-the-art SAW oscillators. One of the key elements in this investigation is the development of a simple, yet sensitive frequency trimming procedure to adjust the resonator frequency of a fabricated device. Background and procedural information for performing frequency trimming on a SAW resonator using a wet isotropic chemical etch are provided in this report. The results of this study revealed a trimming sensitivity of 0.33 ppm/A and 11.4% of performance degradation for a 10 kHz or 100 ppm shift in the resonant frequency of a device.

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Document Details

Document Type
Technical Report
Publication Date
Jun 01, 1992
Accession Number
ADA261465

Entities

People

  • Jeffrey Himmel
  • John Kosinski
  • Raymond Mcgowan
  • Richard Piekarz
  • Theodore Lukaszek

Tags

Communities of Interest

  • Advanced Electronics
  • Energy and Power Technologies

DTIC Thesaurus Topics

  • Acoustic Waves
  • Circuits
  • Communication Systems
  • Equivalent Circuits
  • Fabrication
  • Frequency
  • Frequency Response
  • Frequency Shift
  • Materials
  • Phase
  • Resonance
  • Resonant Frequency
  • Surface Acoustic Wave Devices
  • Surface Acoustic Waves
  • Test Fixtures
  • Transducers
  • Vibration

Readers

  • Microwave Engineering.
  • Nanofabrication and Microfabrication.
  • Systems Analysis and Design