Multivariable Control for Flexible IC Processing

Abstract

The objective of this DARPA research project was to develop real-time control systems using in-situ sensors for semiconductor manufacturing. Our initial application was the development of a temperature control system for Rapid Thermal Processing (RTP) equipment. We developed mathematical models of RTP, analyzed them. identified and validated these models, deduced several control algorithms and finally applied them to real systems at Stanford University and at Texas Instruments. Also, based on our analysis, we modified the design of the system hardware (lamp array) and also proposed an optimal lamp array design technique.

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Document Details

Document Type
Technical Report
Publication Date
Nov 30, 1992
Accession Number
ADA261685

Entities

People

  • Thomas Kailath

Organizations

  • Stanford University

Tags

Communities of Interest

  • Advanced Electronics
  • Sensors

DTIC Thesaurus Topics

  • Change Detection
  • Computational Science
  • Computer Programs
  • Computer Vision
  • Computers
  • Control Systems
  • Detection
  • Electrical Engineering
  • Fabrication
  • Image Processing
  • Integrated Circuits
  • Kalman Filters
  • Manufacturing
  • Mathematical Models
  • Pattern Recognition
  • Semiconductor Manufacturing
  • Signal Processing

Readers

  • Computational Modeling and Simulation
  • Electrical Engineering
  • Technical Research and Report Writing.

Technology Areas

  • Microelectronics
  • Microelectronics - Microelectromechanical Systems