Ir-Zr Alloys as Diffusion Barriers between Cu and Si (100)
Abstract
Ir-Zr alloys were studied as diffusion barriers between Cu and Si with XRD, AES, RBS and resistivity measurements. An amorphous Ir 0.84 Zr alloy was found to be a better diffusion barrier than a polycrystalline ir 2.85 Zr alloy, with the amorphous alloy serving as a satisfactory diffusion barrier up to 800 deg C. The diffusion constants were determined at various temperatures, and the activation energy for Si out-diffusion in Cu/Ir 0.84 Zr/Si was obtained. ... Ir-Zr Alloys, Diffusion barriers.
Document Details
- Document Type
- Technical Report
- Publication Date
- Dec 01, 1993
- Accession Number
- ADA261919
Entities
People
- C. M. Gilmore
- D. E. Ramaker
- Hong-Tao Yang
Organizations
- Georgetown University