Field-Emitter Arrays for RF Vacuum Microelectronics
Abstract
SRI International has completed the fifth quarter of a program to develop field-emitter arrays for vacuum microelectronics. The goals of the effort are 5 mA at 5 A/sq cm for at least 2 hours, and demonstrated modulation of the emission at 1 GHz. Low-capacitance cathodes were fabricated that produced 10 mA emission with an applied voltage of 130V, using a chemical vapor deposition process to produce SiO2 layers. One year of continuous 1000-tip cathode operation was achieved for a low-frequency emission test, significantly exceeding the program current density goal. Fabrication and assembly were completed for an apparatus required for microwave testing. In the program to optimize performance of field-emitter arrays, a series of plasma-cleaning experiments, involving hydrogen glow discharge, was performed.... Field-emitter array, Vacuum microelectronics, Low-capacitance cathode.
Document Details
- Document Type
- Technical Report
- Publication Date
- Mar 01, 1993
- Accession Number
- ADA262677
Entities
People
- A. Rosengreen
- C. A. Spindt
- P. R. Schwoebel
Organizations
- SRI International