Specific Contact Resistance Measurements of Ohmic Contacts to Diamond

Abstract

We have demonstrated the applicability of the specific contact resistance measurement scheme of Reeves to semiconducting diamond. Four sample types were used: highly doped epitaxial films on < 100 > and < 110 > type IIa substrates; a type IIb diamond 0.25 mm thick, and a type IIb diamond 0.05 mm thick. Measured specific contact resistances ranged from 2 x 10(exp -5) to 1 x 10(exp -2) ohm-sq cm.... Electronic devices, Diamond technology, Semiconductors.

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Document Details

Document Type
Technical Report
Publication Date
Jan 01, 1991
Accession Number
ADA262818

Entities

People

  • C. A. Hewett
  • C. R. Zeisse
  • J. R. Zeidler
  • K. L. Moazed
  • M. J. Taylor

Organizations

  • Naval Command, Control and Ocean Surveillance Center

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Auger Electron Spectroscopy
  • Auger Electrons
  • Carbides
  • Charge Carriers
  • Diamond Films
  • Electron Spectroscopy
  • Engineering
  • Films
  • High Temperature
  • Materials
  • Materials Science
  • Measurement
  • Metal-Semiconductor Junctions
  • Metals
  • Resistance
  • Semiconductors
  • Transmission Lines

Fields of Study

  • Materials science

Readers

  • Thin Film Deposition Science.

Technology Areas

  • Microelectronics