New Developments in Vacuum Microelectronics

Abstract

This paper describes a new field-vacuum microelectronics or vacuum integrated circuits (VIC). Its principle, the structure of the field emission microtriodes and microfabrication techniques and processing are given in detail. The processing for the thin field emission cathodes is also reviewed. The application of VIC and the related problems for its future development are discussed.

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Document Details

Document Type
Technical Report
Publication Date
Apr 02, 1993
Accession Number
ADA263103

Entities

People

  • Fujian Liao

Organizations

  • National Air and Space Intelligence Center

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Barometric Pressure
  • Circuits
  • Electric Fields
  • Electron Beams
  • Electron Tubes
  • Field Emission
  • Films
  • Flow Rate
  • Integrated Circuits
  • Materials
  • Mean Free Path
  • Metals
  • Microelectronics
  • Semiconductors
  • Standards
  • Switching
  • Thin Films

Readers

  • Electronics Engineering
  • Integrated Circuit Design and Technology.

Technology Areas

  • Microelectronics