Detection of CH3 during CVD Growth of Diamond by Optical Absorption
Abstract
The absolute concentration of CH3 is measured during diamond growth for a range of input CH4 concentrations using multi-element optical absorption spectroscopy at wavelengths 4 near 216 nm. A detection limit of 2xl0 to the 11th power CH3, radicals/cu cm has been achieved. We also detect C2H2 during diamond growth using the same technique.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jan 01, 1992
- Accession Number
- ADA264131
Entities
People
- K. L. Menningen
- L. W. Anderson
- M. A. Childs
- N. W. Spellmeyer
- P. Chevako
Organizations
- University of Wisconsin Madison Department of Physics