Development of an 0 Atom Gun

Abstract

The goal of this project was to produce a source which is compact, durable and mounts on a standard UHV flange for the generation of hyperthermal oxygen atoms. This has been accomplished. In this source oxygen atoms permeate through a Ag membrane held at 500 deg C and are then emitted toward the target from the vacuum side of the membrane by electron stimulated desorption (ESD). The current prototype model generates usable O-atom fluxes of about 10(exp 12) atoms/sq cm/s, and future modifications should increase this flux by 1 to 3 orders of magnitude. Based on the O+ energy distribution, the average O neutral energy is about 5 eV with a fairly broad distribution (FWHM approx. equal 3.6 EV). The information required for the development of this source and a design of the source are presented.

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Document Details

Document Type
Technical Report
Publication Date
Mar 01, 1993
Accession Number
ADA264753

Entities

People

  • Gar B. Hoflund

Organizations

  • University of Florida

Tags

Communities of Interest

  • Advanced Electronics
  • Energy and Power Technologies
  • Space

DTIC Thesaurus Topics

  • Auger Electron Spectroscopy
  • Auger Electrons
  • Chemical Reactions
  • Compound Semiconductors
  • Desorption
  • Electron Spectroscopy
  • Electrons
  • Energy
  • Inorganic Materials
  • Mass Spectra
  • Materials
  • Membranes
  • Models
  • Schematic Diagrams
  • Spacecraft
  • Spectra
  • Spectroscopy

Fields of Study

  • Physics

Readers

  • Molecular Photonics/Laser Physics
  • Software Engineering
  • Thin Film Deposition Science.

Technology Areas

  • Microelectronics