Development of an 0 Atom Gun
Abstract
The goal of this project was to produce a source which is compact, durable and mounts on a standard UHV flange for the generation of hyperthermal oxygen atoms. This has been accomplished. In this source oxygen atoms permeate through a Ag membrane held at 500 deg C and are then emitted toward the target from the vacuum side of the membrane by electron stimulated desorption (ESD). The current prototype model generates usable O-atom fluxes of about 10(exp 12) atoms/sq cm/s, and future modifications should increase this flux by 1 to 3 orders of magnitude. Based on the O+ energy distribution, the average O neutral energy is about 5 eV with a fairly broad distribution (FWHM approx. equal 3.6 EV). The information required for the development of this source and a design of the source are presented.
Document Details
- Document Type
- Technical Report
- Publication Date
- Mar 01, 1993
- Accession Number
- ADA264753
Entities
People
- Gar B. Hoflund
Organizations
- University of Florida