Smart Spatial Light Modulator Research and Development
Abstract
The objective of our research is to demonstrate 'smart' spatial light modulators (S-SLM) where electronic logic circuits are combined with light modulators and detectors. Our previous studies, while providing valuable insights, indicated that shortcomings of certain approaches limit their applicability to combine Si-based driver and logic circuits with PLZT modulators. For example, PLZT substrate damage limited laser recrystallization approach. Lastly, voltage compatibility problem exists that imposes difficulties in the integration of the modulator driver circuit (requiring 30-50V) in the Si- waver containing logic circuits (operating at 5V). In order to resolve these limitations we explored (1) two methods of implementing thin films of Si-band driver circuits directly onto PLZT substrates and (2) flip-chip bonding of Si wafer containing detector and logic circuits onto the silicon bonded directly to bulk PLZT substrate for fabrication of S-SLM.
Document Details
- Document Type
- Technical Report
- Publication Date
- Feb 28, 1993
- Accession Number
- ADA264928
Entities
People
- Sing H. Lee
Organizations
- University of California, San Diego