Bipolar Junction Transistors Fabricated in Silicon-On-Sapphire
Abstract
The effects of processing temperature on collector leakage current in bipolar junction transistors (BJTs) fabricated in silicon-on-sapphire (SOS) were examined. At low process temperatures (850 deg C) a reduction of five orders of magnitude in the collector leakage current was observed. Excellent I-V characteristics were obtained on both NPN and PNP transistors fabricated at lower temperatures. Measured DC current gain Beta for the NPN devices was 30, and that of the PNP devices was 40. Additionally, current mode logic (CML) circuits fabricated using these transistors exhibited well behaved DC switching characteristics.
Document Details
- Document Type
- Technical Report
- Publication Date
- May 01, 1992
- Accession Number
- ADA264992
Entities
People
- B. Offord
- E. N. Cartagena
- Griselda GarcĂa
Organizations
- Naval Command, Control and Ocean Surveillance Center