Multicomponent and Multilayered Thin Films for Advanced Microtechnologies: Techniques, Fundamentals, and Devices

Abstract

The main objective of the Institute was to bring together scientists from different fields of research such as semiconductor, oxide, and metallic materials, as well as those working on the development of systems for thin film processing and characterization. The highly interdisciplinary nature of the Institute allowed participant scientists to interchange ideas in an environment rarely available in other international conferences. This has opened a window of opportunities for collaborations in research and development, which more and more will require interdisciplinary exchange of ideas.

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Document Details

Document Type
Technical Report
Publication Date
Mar 21, 1993
Accession Number
ADA265685

Entities

People

  • Orlando Auciello

Tags

DTIC Thesaurus Topics

  • Ceramic Materials
  • Chemical Vapor Deposition
  • Chemistry
  • Compound Semiconductors
  • Electron Microscopy
  • Films
  • Geography
  • High Temperature
  • Ion Beams
  • Materials
  • Materials Science
  • Oxides
  • Physical Vapor Deposition
  • Semiconductors
  • Sputtering
  • Thin Films
  • Transition Temperature

Fields of Study

  • Physics

Readers

  • Defense Technology Research and Development.
  • Integrated Circuit Design and Technology.
  • Technical Research and Report Writing.

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene