The Modification of Polymer Surfaces and the Fabrication of Submicron- Scale Functionalized Structures by Deep-UV and Electron Beam Lithography

Abstract

We present a general technique to modify polymer surfaces using N- hydroxysuccinimide (NHS) funtionalized perfluorophenyl azides (PFPAs). Thin polystyrene films are spin-coated with a solution containing the NHS PFPA ester and are either UV photolyzed with a dosage of 10 mJ sq cm or exposed with a 15 kV electron beam with a dosage between 1 and 75 micrometers / sq cm. The NHS active ester groups become covalently attached to the polymer via photogenerated or electron beam generated, highly reactive nitrene intermediates derived from the PFPA. Using this technique we demonstrate that well-defined surface regions can be funtionalized with a minimum observable feature size of 0.5 micrometers and 0.2 micrometers for UV and electron-beam exposure, respectively. Through reaction of the functionalized surfaces with primary amine-containing reagents, we have installed biological molecules on the polymer and have measured the activity of an immobilized enzyme.

Open PDF

Document Details

Document Type
Technical Report
Publication Date
Jun 10, 1993
Accession Number
ADA265956

Entities

People

  • Jianzhi Wu
  • John F. Keana
  • M. N. Wybourne
  • Mingdi Yan
  • Sui X. Cai

Organizations

  • University of Oregon

Tags

Communities of Interest

  • Advanced Electronics
  • Energy and Power Technologies
  • Weapons Technologies

DTIC Thesaurus Topics

  • Chemical Reactions
  • Chemical Synthesis
  • Chemistry
  • Contrast
  • Decomposition
  • Deep Ultraviolet Lithography
  • Electron Beam Lithography
  • Electron Beams
  • Electron Microscopes
  • Films
  • Lithography
  • Microscopes
  • Microstructure
  • Molecules
  • Photolithography
  • Photolysis
  • Polymers

Fields of Study

  • Physics

Readers

  • Molecular and Cellular Biochemistry
  • Nanofabrication and Microfabrication.
  • Pulsed Power and Plasma Physics.

Technology Areas

  • Directed Energy
  • Directed Energy - Lasers
  • Microelectronics
  • Microelectronics - Graphene