Ballistic Electron Transport Studies Using BEEM
Abstract
Most of the effort the first year of this program has been devoted to the building of required instrumentation. The thin metal films required for this work necessitated having a feed-back controller for the multi hearth electron beam evaporator in the MBE system. Thus, one of our initial projects under this grant was the installation of a Inficon Sentinel controller in the MBE system. This project has been successfully competed. The new electron beam evaporator, with its controller, will allow us to evaporate Pt and Au and Ge in the deposition chamber in addition to Si and Co which were already available. We have started MBE growth of SiGe alloys with a new student (Byong Kim) and expect to start BEEM studies of metal layers on SiGe alloys this summer. A key part of this project is the ultra-high vacuum (UHV) BEEM studies of MBE grown material. After debating the alternatives, we have decided to install the UHV STM directly into the MBE chamber after testing it in air.
Document Details
- Document Type
- Technical Report
- Publication Date
- May 15, 1993
- Accession Number
- ADA266029
Entities
People
- L. J. Schowalter
Organizations
- Rensselaer Polytechnic Institute