RF Vacuum Microelectronics Open PDF Document Details Document Type Technical Report Publication Date Jul 01, 1993 Accession Number ADA266569 Entities Organizations RTX Tags DTIC Thesaurus Topics Capacitance Directed Energy Weapons Electrical Properties Emitters Frequency High Voltage Life Tests Long Life Materials Sapphire Substrates Test And Evaluation Test Equipment Test Sets Test Stands Voltage Technology Areas Microelectronics