Phosphine Chemistry on Mo(110) and Oxidized Mo(110)

Abstract

The adsorption and desorption of phosphine and the oxidation of phosphorus on Mo(110) and oxidized Mo(110) have been studied by using Auger electron spectroscopy (AES), temperature-programmed desorption (TPD), and low- energy electron diffraction (LEED). Both molecular desorption and dissociative processes were observed on Mo(110), leaving adsorbed P(a) species in a c(4x1) overlayer structure. The P(a) species do not undergo diffusion into the bulk below 1000 K. On the oxidized Mo(110) surface, the phosphine adsorption and dissociation process was inhibited significantly. Phosphorus on the Mo(110) surface could be oxidized to produce PO(g) and PO2(g) species near 900 K, as detected by line-of-sight mass spectroscopy; neither P2O3(g) nor P2O5(g) was observed

Open PDF

Document Details

Document Type
Technical Report
Publication Date
Jan 01, 1993
Accession Number
ADA266717

Entities

People

  • A. Linsebigler
  • J. T. Yates Jr.
  • U. Heiz
  • Xiaoxuan Zhang

Organizations

  • University of Pittsburgh

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Auger Electron Spectroscopy
  • Auger Electrons
  • Chemistry
  • Desorption
  • Diffraction
  • Dissociation
  • Electron Diffraction
  • Electron Spectroscopy
  • Electrons
  • Mass Spectrometry
  • Mass Spectroscopy
  • Measurement
  • Phosphorus Compounds
  • Physical Chemistry
  • Spectra
  • Spectrometry
  • Spectroscopy

Fields of Study

  • Chemistry

Readers

  • Electrochemical Engineering/ Fuel Cell Technologies
  • Thin Film Deposition Science.

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene