A High Flux Radical Beam Diamond Growth
Abstract
Research on chemical vapor deposition (CVD) of diamond films is summarized. The development of a technique for High Sensitivity Absorption Spectroscopy at deep ultraviolet wavelengths in CVD systems is reported. Diagnostic experiments on the diamond CVD environment are described.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jun 10, 1993
- Accession Number
- ADA266754
Entities
People
- J. E. Lawler
- L. W. Anderson
Organizations
- University of Wisconsin Madison Department of Physics