Single Crystal Diamond Films

Abstract

Diamond films are important for radiation tolerant devices. However, fabrication of single crystal films has proven to be much more difficult than polycrystalline deposits. A novel deposition process is proposed which can be used to deposit diamond on a seed crystal. The technique permits patterned deposits in islands and offers the potential of a new method for attempting to dope diamond semiconductors.... Single crystal, Diamond, Thin films, Radiation tolerant

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Document Details

Document Type
Technical Report
Publication Date
May 28, 1993
Accession Number
ADA266759

Entities

People

  • Richard Sahagian
  • Stephen N. Bunker

Tags

DTIC Thesaurus Topics

  • Chemical Reactions
  • Chemical Vapor Deposition
  • Coatings
  • Compound Semiconductors
  • Crystal Lattices
  • Crystals
  • Diamond Films
  • Epitaxial Growth
  • Fabrication
  • Films
  • Materials
  • Radiation
  • Semiconductors
  • Silicon Carbide
  • Single Crystals
  • Spectra
  • Thin Films

Fields of Study

  • Physics

Readers

  • Applied Combinatorial Optimization and Logic Circuit Design.
  • Materials Science and Engineering.
  • Nanoscale Plasmonic Nanotechnology

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene