The Specific Heat of Titanium Disilicide

Abstract

Titanium disilicide is a promising candidate for use in the circuitry of the next generation of micro-electronics. The fabrication techniques used by the electronics industry require accurate thermodynamic data. We have therefore undertaken the measurement of the specific heat of TiSi2. The titanium disilicide alloy has been produced and characterized. The lattice parameters of TiSi2 have been found to be: a=8.2607 + or - 0.0004 A, b=4.7967 + or -A, and c=8.545 + or - 0.002 A by x-ray diffractometry. The specific heat of titanium disilicide has been measured from 100 K to 500 K by means of differential scanning calorimetry. These data show good agreement with accepted specific heat theory, following the general shape of a Debye curve and approaching a Dulong- Petit value. From these data a Debye temperature of 510 + or - 80 K has been graphically approximated. The methodology of specific heat measurements using differential scanning calorimetry has been reviewed.

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Document Details

Document Type
Technical Report
Publication Date
May 01, 1993
Accession Number
ADA267543

Entities

People

  • William K. Sylla

Organizations

  • Air Force Institute of Technology

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Air Force
  • Chemical Vapor Deposition
  • Chemistry
  • Electronics
  • Electronics Industry
  • Energy
  • Enthalpy
  • Heat Capacity
  • Heat Energy
  • Isotherms
  • Materials
  • Measurement
  • New York
  • Specific Heat
  • Thermodynamics
  • Transition Temperature
  • X Rays

Fields of Study

  • Materials science

Readers

  • Combustion Dynamics and Shock Wave Physics.
  • Materials Science and Engineering.
  • Nanoscale Plasmonic Nanotechnology

Technology Areas

  • Microelectronics