The Specific Heat of Titanium Disilicide
Abstract
Titanium disilicide is a promising candidate for use in the circuitry of the next generation of micro-electronics. The fabrication techniques used by the electronics industry require accurate thermodynamic data. We have therefore undertaken the measurement of the specific heat of TiSi2. The titanium disilicide alloy has been produced and characterized. The lattice parameters of TiSi2 have been found to be: a=8.2607 + or - 0.0004 A, b=4.7967 + or -A, and c=8.545 + or - 0.002 A by x-ray diffractometry. The specific heat of titanium disilicide has been measured from 100 K to 500 K by means of differential scanning calorimetry. These data show good agreement with accepted specific heat theory, following the general shape of a Debye curve and approaching a Dulong- Petit value. From these data a Debye temperature of 510 + or - 80 K has been graphically approximated. The methodology of specific heat measurements using differential scanning calorimetry has been reviewed.
Document Details
- Document Type
- Technical Report
- Publication Date
- May 01, 1993
- Accession Number
- ADA267543
Entities
People
- William K. Sylla
Organizations
- Air Force Institute of Technology