Structural Characterization of Epitaxial Layers for Infrared Detectors
Abstract
Initial structural characterization of germanium-silicon epitaxial layers for heterojunction internal photoemission and multiple quantum well infrared detectors has been performed. Cross sectional TEM of multiple quantum wells has been used to confirm period and well thickness measurements performed by other techniques. No defects were observed by TEM in these layers. A variety of other layers including multiple quantum wells on relaxed buffers and heterojunction internal photoemission detector structures have been characterized by defect etching and X-ray diffraction.... Epitaxial, Germanium, Silicon, Infrared.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jun 22, 1993
- Accession Number
- ADA267875
Entities
People
- D. W. Greve
Organizations
- Carnegie Mellon University