Soft X-Ray Emission from Alexandrite Laser-Matter-Interaction

Abstract

X-ray spectroscopy was used to quantify the plasma generated by a focused, Alexandrite laser as a potential alternative source in proximity lithography. An x-ray emission efficiency of 2 - 11% was determined by analysis of spectral data (10 - 14A) from transition-metal targets.... X-ray spectroscopy, Proximity, Lithography

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Document Details

Document Type
Technical Report
Publication Date
Jul 15, 1993
Accession Number
ADA267905

Entities

People

  • D. A. Newman
  • D. J. Harter
  • E. F. Gabl
  • P. Bado
  • P. G. Burkhalter

Organizations

  • United States Naval Research Laboratory

Tags

Communities of Interest

  • Energy and Power Technologies
  • Materials and Manufacturing Processes

DTIC Thesaurus Topics

  • Abstracts
  • Carbonate Esters
  • Efficiency
  • Emission
  • Lasers
  • Lithography
  • Metals
  • Radiation
  • Soft X Rays
  • Spectra
  • Spectral Lines
  • Spectroscopy
  • Subatomic Particles
  • Transition Metals
  • Transitions
  • X Ray Spectroscopy
  • X Rays

Fields of Study

  • Physics

Readers

  • Optical Physics and Photonics.
  • Pulsed Power and Plasma Physics.
  • Quantum Dot Semiconductor Device Photonics and Graphene Optoelectronic Materials and THz Physics.

Technology Areas

  • Directed Energy