Precise Flux Control for Lattice Matched Superlattice Materials

Abstract

We have investigated flux transients in Molecular Beam Epitaxy (MBE) sources. A detailed study of the relevant factors has been carried out. For the first time Ga transient was measured in the presence of as in a realistic growth environment. Growth rate variation due to transients can be accurately monitored by RHEED analysis. We demonstrated that transients could be minimized or even eliminated by source temperature ramping and mass spectrometer feedback control.

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Document Details

Document Type
Technical Report
Publication Date
Feb 01, 1993
Accession Number
ADA268254

Entities

People

  • Peter P. Chow

Tags

Communities of Interest

  • Advanced Electronics
  • Sensors

DTIC Thesaurus Topics

  • Air Force
  • Computer Programs
  • Computers
  • Control Systems
  • Crystal Lattices
  • Detectors
  • Diffraction
  • Electromagnetic Fields
  • Fuzzy Logic
  • Governments
  • Mass Spectrometers
  • Materials
  • Measurement
  • Molecular Beams
  • Partial Pressure
  • Phase
  • Vapor Pressure

Readers

  • Thermal Physics or Thermal Science.
  • Thin Film Deposition Science.