RF Vacuum Microelectronics

Abstract

The result of the 18 month research and development project on high frequency Field Emission Array (FEA) cathodes is presented. Details of the process development and test procedures are discussed. The results relative to the program goals are presented. Finally, suggestions for future work in the 12 month option portion of the project are presented.... Field emission, Vacuum tubes, Cathodes.

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Document Details

Document Type
Technical Report
Publication Date
Aug 08, 1993
Accession Number
ADA268399

Entities

People

  • Alan Palevsky

Organizations

  • RTX

Tags

DTIC Thesaurus Topics

  • Capacitance
  • Chemical Vapor Deposition
  • Composite Materials
  • Electron Emission
  • Electron Tubes
  • Emission
  • Emitters
  • Equivalent Circuits
  • Fabrication
  • Field Emission
  • Frequency
  • Impedance
  • Materials
  • Measurement
  • Microelectronics
  • Standards
  • Test Stands

Fields of Study

  • Physics

Readers

  • Electronics Engineering
  • Software Engineering

Technology Areas

  • Microelectronics
  • Microelectronics - Microelectromechanical Systems