Field Emitter Arrays for RF Vacuum Microelectronics

Abstract

SRI International has completed the sixth quarter of a program to develop field-emitter arrays for vacuum microelectronics. We have met the first- phase program goals of 5 mA total emission, with a current density of 5 A/sq cm for at least 2 hours and demonstrated modulation of the emission current at a frequency of 1 GHz. A series of controlled tests was initiated with photoresist/ developer/stripper combinations to identify the source of a contamination problem in the

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Document Details

Document Type
Technical Report
Publication Date
Aug 04, 1993
Accession Number
ADA268595

Entities

People

  • A. Rosengreen
  • C. A. Spindt
  • P. R. Schwoebel

Organizations

  • SRI International

Tags

DTIC Thesaurus Topics

  • Abstracts
  • Capacitance
  • Contamination
  • Current Density
  • Electronics
  • Electronics Laboratories
  • Emission
  • Emitters
  • Fabrication
  • Films
  • Frequency
  • Materials
  • Measurement
  • Microelectronics
  • Microwave Amplifiers
  • Modulation
  • Sequences

Fields of Study

  • Physics

Readers

  • Electronics Engineering
  • Software Engineering

Technology Areas

  • Microelectronics