Field Emitter Arrays for RF Vacuum Microelectronics
Abstract
SRI International has completed the sixth quarter of a program to develop field-emitter arrays for vacuum microelectronics. We have met the first- phase program goals of 5 mA total emission, with a current density of 5 A/sq cm for at least 2 hours and demonstrated modulation of the emission current at a frequency of 1 GHz. A series of controlled tests was initiated with photoresist/ developer/stripper combinations to identify the source of a contamination problem in the
Document Details
- Document Type
- Technical Report
- Publication Date
- Aug 04, 1993
- Accession Number
- ADA268595
Entities
People
- A. Rosengreen
- C. A. Spindt
- P. R. Schwoebel
Organizations
- SRI International