Soft X-Ray Projection Lithography. Organization of the Photonics Science Topical Meetings Held in Monterey, California on May 10-12, 1993

Abstract

The agenda of sessions of this symposium includes: (1) Modeling; (2) Condenser; (3) Multilayer 1; (4) Imaging experiments; (5) Optical metrology; (6) X-Ray metrology; (7) Multilayer 2; and (8) Alternate strategies.

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Document Details

Document Type
Technical Report
Publication Date
May 10, 1993
Accession Number
ADA269159

Entities

People

  • Jarus W. Quinn

Organizations

  • Optica

Tags

Communities of Interest

  • Advanced Electronics
  • Energy and Power Technologies

DTIC Thesaurus Topics

  • Construction
  • Electron Beam Lithography
  • Electronics Industry
  • Light Sources
  • Manufacturing
  • Material Degradation Processes
  • Materials Laboratories
  • Materials Processing
  • Materials Science
  • Materials Testing
  • Measurement
  • Optics
  • Physics Laboratories
  • Printing
  • Semiconductors
  • Three Dimensional
  • X Rays

Fields of Study

  • Physics

Readers

  • Academic Conference Management
  • Nanofabrication and Microfabrication.