Analysis of Cost: CVD Diamond Deposition

Abstract

IBIS Associates has updated its predictive spreadsheet models of the DC arcjet and microwave chemical vapor deposition (CVD) diamond technologies. This report presents the results obtained with the new models and revised sets of baseline inputs for diamond heat sink manufacture. The cost of producing 1,000 polished diamond wafers, 1 mm thick, is estimated in the long run to be $23.70 per square centimeter by the DC arcjet deposition technology (six inch diameter), and $8.49 per square centimeter by the microwave deposition technology (sixteen inch diameter). Fifty-one percent of the DC arcjet cost is due to the deposition step, which consumes process gases and is capital intensive. Overall, the material cost of 31.2% and labor cost of 30.2% are significant factors in the total cost.

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Document Details

Document Type
Technical Report
Publication Date
Jan 01, 1993
Accession Number
ADA271980

Tags

Communities of Interest

  • Energy and Power Technologies

DTIC Thesaurus Topics

  • Boundaries
  • Boundary Layer
  • Chemical Reactions
  • Chemical Vapor Deposition
  • Coefficients
  • Cost Models
  • Cost Reductions
  • Diffusion Theory
  • Equations
  • Flow Rate
  • Gas Flow
  • Mach Number
  • Materials
  • Plastic Explosives
  • Production Rate
  • Temperature Control
  • Vapor Deposition

Readers

  • Economics
  • Mathematics or Statistics
  • Semiconductor Device Technology