Growth, Characterization and Device Development in Monocrystalline Diamond Films

Abstract

The effects of hydrogen on cluster binding energy and resulting growth mode during chemical vapor deposition of diamond, the process parameters and the effect of substrates during bias enhanced nucleation, the growth of textured diamond films, the characterization of these films using transmission electron microscopy, Raman spectroscopy and photo-luminescence comprise the growth and thin film characterization research conducted during this grant. Additional work included determination of the surface properties including the negative electron affinity, the growth and characterization of SiGe contacts, and the modeling and characterization of electronic devices. The nucleation of diamond grains on unscratched Si(100) wafer is enhanced by four order of magnitude relative to scratched substrates by using negative bias-enhanced microwave plasma CVD in a 2% methane/hydrogen plasma for an initial period. In vacuo surface analysis has revealed that the actual nucleation occurs on the amorphous C coating present on the thin SiC layer which forms as the product of the initial reaction with the Si surface. It is believed that the C forms critical clusters which are favorable for diamond nucleation. TEM of nucleation of diamonds on single crystal SiC showed that approximately half of the diamond nuclei were in epitaxial alignment with the SiC substrate. UV photoemission spectroscopy have revealed Schottky barrier heights of 1.0 + or -0.2 eV and 1.5 + or - 0.2 for the Ti-diamond (111) and (100) interfaces. Diamond, Bias-enhanced nucleation, Microwave plasma CVD, Transmission electron microscopy, Raman spectroscopy, Photoluminescence, Negative electron affinity, Metal-diamond interfaces, SiGe Contacts, Electronic properties, Modeling, MESFETS, C-BN- Diamond system.

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Document Details

Document Type
Technical Report
Publication Date
Oct 31, 1993
Accession Number
ADA273097

Entities

People

  • Robert F Davis

Organizations

  • North Carolina State University

Tags

Communities of Interest

  • Advanced Electronics
  • Energy and Power Technologies

DTIC Thesaurus Topics

  • Ceramic Materials
  • Chemical Vapor Deposition
  • Chemistry
  • Electronics Laboratories
  • Energy Bands
  • Field Effect Transistors
  • Material Degradation Processes
  • Materials
  • Materials Processing
  • Materials Science
  • P-N Junctions
  • Semiconductors
  • Silicon Carbide
  • Solid State Physics
  • Surface Properties
  • Three Dimensional
  • Two Dimensional

Fields of Study

  • Materials science

Readers

  • Semiconductor Device Technology
  • Thin Film Deposition Science.

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene