Scanning Probe Surface Modification

Abstract

Nanometer-scale manipulation of surfaces is important because subtle changes in surface structure often result in new electronic, magnetic, photonic, and mechanical materials properties. In this brief article we address one aspect of nanometer-scale surface manipulation that is of both technological and fundamental interest: scanning probe microscope (SPM)-induced patterning of surfaces. We begin by discussing traditional methods for submicron patterning, then we address some general aspects of SPM surface manipulation, and finally we present some specific results from our own laboratory.

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Document Details

Document Type
Technical Report
Publication Date
Nov 23, 1993
Accession Number
ADA273178

Entities

People

  • C. B. Ross
  • J. K. Schoer
  • M. J. Hampden-smith
  • R. M. Crooks
  • T. S. Corbitt

Organizations

  • University of New Mexico

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Advanced Materials
  • Chemical Vapor Deposition
  • Chemistry
  • Electron Emission
  • Electrons
  • Emission
  • Fabrication
  • Field Emission
  • Low Temperature
  • Materials
  • Materials Processing
  • Materials Science
  • Microscopes
  • New Mexico
  • Organic Materials
  • Scanning
  • Vapor Deposition

Readers

  • Nanoscale Plasmonic Nanotechnology
  • Systems Analysis and Design

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene