Ultra-High Aggregate Bandwidth Two-Dimensional Multiple-Wavelength Diode Laser Arrays
Abstract
Two-dimensional (2D) multi-wavelength vertical cavity surface emitting laser (VCSEL) arrays is promising for ultrahigh aggregate capacity optical networks. A 2D VCSEL array emitting 140 distinct wavelengths was reported by implementing a spatially graded layer in the VCSEL structure, which in turn creates a wavelength spread. In this program, we concentrated on novel epitaxial growth techniques to make reproducible and repeatable multi-wavelength VCSEL arrays. Our approach to fabricate the spatially graded layer involves creating a nonuniform substrate surface temperature across the wafer during the growth of the cavity spacer region using the fact that the molecular beam epitaxy growth of GaAs is highly sensitive to the substrate temperature. We are investigating growth with the use a patterned spacer (either a Ga or Si substrate) placed in-between the substrate and its heater. We have calculated the temperature distribution on such wafers to guide our experiments. We also built a reflectivity measurement apparatus that is capable of mapping a 2 in. wafer with a 100 micrometers diameter resolution for diagnosing our wafers. In this first six-month report, we present our calculations, the various experimental results, and a discussion on future directions. MBE, Patterned substrate, VCSEL.
Document Details
- Document Type
- Technical Report
- Publication Date
- Dec 09, 1993
- Accession Number
- ADA274018
Entities
People
- Connie Chang-hasnain
Organizations
- Stanford University