The Effects of Molecular Orientation Geometry and Surface Anisotropy Upon Etching

Abstract

Sticking probabilities have been measured for molecular chlorine upon the GaAs (100) Ga-rich c(8x2), GaAs(100) As-rich C(2.8) and GaAs(110) stoichiometric (1x1) surfaces. The sticking probability has measured as a function of incident translational energy (0.038 to 0.66 eV), surface temperature (150 K - 835 K), angle of incidence (0 deg to 37 deg), and surface chlorine coverage. Our data indicate the presence of both precursor and direct activated chemisorption mechanisms on all three surfaces. Total energy scaling is observed on both the GaAs(100) Ga-rich c(8x2) surface and the stoichiometric (1x1) surface for both precursor mediated and direct activated chemisorption, indicating a highly corrugated gas-surface interaction potential.

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Document Details

Document Type
Technical Report
Publication Date
Dec 01, 1993
Accession Number
ADA275154

Entities

People

  • Andrew C Kummel

Organizations

  • University of California, Santa Barbara

Tags

Communities of Interest

  • Energy and Power Technologies

DTIC Thesaurus Topics

  • Abstracts
  • Angle Of Incidence
  • Anisotropy
  • Chemisorption
  • Chlorine
  • Classification
  • Gas Surface Interactions
  • Geometry
  • Mathematics
  • Molecular Beams
  • Orientation (Direction)
  • Physical Properties
  • Precursors
  • Probability
  • Security
  • Surface Temperature

Readers

  • Molecular Photonics/Laser Physics
  • Thin Film Deposition Science.