RF Vacuum Microelectronics

Abstract

We summarize our progress towards developing a thin film edge emitter vacuum transistor capable of 1 GHz modulation. The second fabrication run of vacuum transistors was carried out and is approximately 90% complete. Fabrication is anticipated to be completed in early January 1994. Vacuum microelectronics, Edge emitter, Thin film technology, High frequency devices, Triodes.

Open PDF

Document Details

Document Type
Technical Report
Publication Date
Feb 15, 1994
Accession Number
ADA276512

Entities

People

  • D. K. Arch

Organizations

  • Honeywell International, Inc.

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Abstracts
  • Assembly
  • Emitters
  • Fabrication
  • Film Resistors
  • Films
  • Frequency
  • Manufacturing
  • Microelectronics
  • Micromachining
  • Microwaves
  • Modulation
  • Semiconductor Manufacturing
  • Thin Film Resistors
  • Thin Films
  • Transistors

Fields of Study

  • Physics

Readers

  • Integrated Circuit Design and Technology.
  • Thin Film Deposition Science.

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene