Materials Processing and Manufacturing Technologies for Diamond Substrates Multichip Modules
Abstract
In this quarter we have succeeded in transferring high growth rate diamond process from our 8kW prototype to our 75kW reactor, and generated the first free-standing diamond fils of greater than 4 in. x 4 in. size. Our efforts have concentrated on: improving the growth rate and film quality of the diamond growth process, exploring the operating envelope of the 75kW reactor, and designing improvements to fully realize the potential of the large scale high growth system. New program components have been initiated for developing release techniques on large substrates, improving film flatness, and improving uniformity of thickness and morphology. A thermal conductivity, test stand is in the planning stages for in-house testing of samples in the near future
Document Details
- Document Type
- Technical Report
- Publication Date
- Feb 12, 1994
- Accession Number
- ADA276904
Entities
People
- Evelio Sevillanon