Final Progress Report on ONR Grant N00014-90-J-1691 (University of North Texas, Denton. Department of Physics)
Abstract
Because of the high sensitivities and small sample size capabilities, an Accelerator Mass Spectrometry (AMS) system has been constructed at the Ion Beam Modification and Analysis Laboratory (IBMAL) at the University of North Texas. The AMS system, which has been developed through a collaboration with Texas Instruments Inc., the National Science Foundation, and the Office of Naval Research has been applied to trace element analysis of stable isotopes in electronic materials. The terminal charge stripping inherent with tandem accelerator operation allows molecular interferences to be removed. The interferences of molecules that have approximately the same mass as the element of interest (e.g. (28Si)2 and 56Fe) are one of the primary limits to high sensitivities for SIMS. Because AMS has increased sensitivities over SIMS for some elements by factors of 100 to 1000 due to the removal of molecular interferences, AMS is sometimes called 'Super-SIMS'. The unique capabilities of AMS allow new and more sensitive methods for the characterization of trace impurities in electronic materials.
Document Details
- Document Type
- Technical Report
- Publication Date
- Feb 02, 1994
- Accession Number
- ADA277113
Entities
People
- Floyd D. Mcdaniel
Organizations
- University of North Texas