Atomic Force Microscopy

Abstract

Atomic Force Microscopy (AFM) has been used to study the surface microstructure of aluminum metallization. The effects of plasma cleaning and annealing on the surface structure of aluminum are shown and discussed. A brief description of the theories of Atomic Force Microscopy (AFM) and Scanning Tunneling Microscopy (STM) is given. The technique of AFM, the importance of tip geometry and sample orientation on image appearance and the significance of edge/tip interaction on interpretation of AFM data are discussed. Atomic level imaging capability of AFM is also demonstrated. Atomic force microscopy, Aluminum metallization, Thin films.

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Document Details

Document Type
Technical Report
Publication Date
Dec 01, 1993
Accession Number
ADA277589

Entities

People

  • Joseph V. Beasock

Organizations

  • Rome Laboratory

Tags

Communities of Interest

  • Advanced Electronics

DTIC Thesaurus Topics

  • Air Force
  • Aspect Ratio
  • Command And Control
  • Computer Science
  • Films
  • Geometry
  • Grain Size
  • Microcircuits
  • Microscopes
  • Microscopy
  • Reliability
  • Standards
  • Surface Properties
  • Surface Roughness
  • Thin Films
  • Three Dimensional
  • Ultrasonic Cleaning

Fields of Study

  • Physics

Readers

  • Thin Film Deposition Science.