Low Temperature Materials Growth and Processing Development for Flat Panel Display Technology Applications
Abstract
The primary purpose of this research effort is in developing process technologies that focus on lowering of the fabrication temperatures for flat panel displays. We also intend to work on the improvement and understanding of the important physical and electrical properties of thin film phosphors and other active electronic devices under consideration for use in displays, such as field emitters and thin film transistors. Our present approach is to: (1) Establish a facility for the deposition and processing of thin film phosphors and alpha-Si, including simple device fabrication; (2) Development of the necessary physical measurement techniques to evaluate the films/processes being explored in the above; (3) Cultivate industrial partners to aid in the transfer of knowledge gained during the research and exploration phase. An important aspect of this work will be the incorporation of transient thermal processing techniques, mainly pulsed uv-laser processing, into the development stream.
Document Details
- Document Type
- Technical Report
- Publication Date
- Nov 14, 1993
- Accession Number
- ADA278013
Entities
People
- A. M. Goodman
- Thomas W. Sigmon