Low Voltage Electron Beam Lithography

Abstract

In order to measure the energy spread of electrons emitted from various negative electron affinity cathode structures, a simple apparatus using a uniform retarding field inside night vision tubes and customized tubes (all made by Intevac) was constructed and initial measurements performed. GaAs and GaAsP photocathodes with CsO activations were measured. Energy spreads as low as 100meV were observed from a low quantum efficiency GaAs cathode. An extremely sharp (30meV width) vacuum-level cutoff in the energy distribution from the GaAsP was observed. These two results show both the possible energy resolution of the technique and the energy spreads achievable from negative electron affinity photocathodes. Energy distribution variation indicated the importance of scattering in the band-bending region, and thus suggested the possibility of heterostructure and doping variation at the surface to minimize the energy spread. A design for an optimum cathode was developed.

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Document Details

Document Type
Technical Report
Publication Date
Mar 01, 1994
Accession Number
ADA278204

Entities

People

  • Aaron Baum
  • Brent Boyer
  • Roger Fabian W. Pease

Organizations

  • Stanford University

Tags

DTIC Thesaurus Topics

  • Cathodes
  • Electrodes
  • Electron Beam Lithography
  • Electron Beams
  • Electrons
  • Energy
  • Energy Systems
  • High Energy
  • High Resolution
  • Integrated Circuits
  • Low Voltage
  • Night Vision
  • Photocathodes
  • Quantum Efficiency
  • Semiconductors
  • Space Charge
  • Work Functions

Fields of Study

  • Physics

Readers

  • Electronics Engineering
  • Pulsed Power and Plasma Physics.
  • Quantum Dot Semiconductor Device Photonics and Graphene Optoelectronic Materials and THz Physics.

Technology Areas

  • Directed Energy
  • Microelectronics
  • Quantum Computing