Dynamics of Supermatrix Semiconductor Growth
Abstract
Electronic Materials Engineering and AFOSR have demonstrated a new semiconductor materials technology for electronic and optoelectronic device applications: the Supermatrix Semiconductor (SMS). SMS makes possible the 3-dimensional superlattice and a new method for engineering the properties of semiconductor materials through the synergy of 3-dimensional microstructural ordering. A CrGaAs SMS has been produced in Ingot form (2 in. long and 1 in. diameter) exhibiting a periodic rod-matrix microstructure over wafer-scale distances. Electronic, optical, and structural properties were characterized by PPL, SIMS, RBS, Auger, and x-ray diffraction and correlated to conditions of solidification. It was demonstrated that the cubic degeneracy of GaAs In the CrGaAs matrix is lifted as a result of anisotropic stress and leads to birefringence. Advances in practical processing of SMS materials, Including polishing, have also been achieved to support future device development activities. Supermatrix semiconductor.
Document Details
- Document Type
- Technical Report
- Publication Date
- Dec 24, 1993
- Accession Number
- ADA278380
Entities
People
- Douglas E. Holmes
- Linda Koo