Electrical Characteristics of GaAs MESFET Fabrication by Ion Implantation of Si or Se
Abstract
Since its synthesis in the 1920s by Goldschmidt, Gallium Arsenide has received much attention in the last few decades. In the mid-1980s, GaAs technology finally matured into the age of production. We saw a boom of companies dedicated to the growth of GaAs materials and the fabrication of GaAs devices and integrated circuits. Although GaAs is no longer being considered a general purpose material like silicon, it is now well established in several niche markets, such as Direct Broadcast Satellite, Microwave Monolithic Integrated Circuits and Optoelectronics.
Document Details
- Document Type
- Technical Report
- Publication Date
- Oct 04, 1993
- Accession Number
- ADA278416
Entities
People
- T. W. Sigmon
Organizations
- Stanford University