Theoretical Aspect of Low Pressure Discharges in Simple Gasses
Abstract
Discharges processing is becoming more and more important in many industries. This paper attempts to bring together, in relatively compact form a basic derivation of the physics of processing discharges including collision theory, kinetic theory, simple chemical reactions, fluid formulations and sheath physics.
Document Details
- Document Type
- Technical Report
- Publication Date
- Mar 28, 1994
- Accession Number
- ADA278762
Entities
People
- Wallace M. Manheimer
Organizations
- United States Naval Research Laboratory