An Atomically-Resolved STM Study of the Interaction of Phosphine (PH3) with the Silicon (001) Surface
Abstract
The interaction of phosphine (PH3) with the Si(001) surface has been investigated with scanning tunneling microscopy. At 300 K, PH3 adsorbs molecularly on top of a single Si=Si dimer with the phosphorus atom in a pentacoordinate configuration. Phosphine adsorption is accompanied by occasional ejection of silicon atoms from the substrate onto the surface, creating surface vacancies and Si adatoms. Si atoms are preferentially ejected from defect sites. At high coverage, adsorbed PH3 molecules order into small regions of c(4x2) symmetry and the ejected silicon nucleates into small dimer strings. The long- range order of the molecular PH 3 is disrupted by domain boundaries and the ejected silicon. Annealing PH 3- saturated surfaces produces further ejection of silicon onto the surface, resulting in large silicon islands covering approximately 20% of the surface.
Document Details
- Document Type
- Technical Report
- Publication Date
- May 27, 1994
- Accession Number
- ADA279819
Entities
People
- J. Bronikowski
- R. J. Hamers
- Yaonan Wang