Field-Emitter Arrays for RF Vacuum Microelectronics
Abstract
SRI International has completed the ninth quarter of a program to develop field-emitter arrays for vacuum microelectronics. We have met the first- phase program goals of 5 mA total emission, with a current density of 5 A/sq cm for at least 2 hours and demonstrated modulation of the emission current at a frequency of 1 GHz. An evaluation was made of deposition processes and cone materials that could lead to improved (tall and sharp) cone geometries for low- capacitance cathode fabrication. Principal efforts involved investigation of the limited emission of high-frequency cathode samples, continued stability tests on high-frequency cathodes to determine the effectiveness of processes designed to avoid contamination, and capacitance measurements on cathode samples incorporating an electrostatic shield designed to prevent fringing fields from the base electrode from influencing the trajectories of emitted electrons. Field-emitter array, Vacuum microelectronics, Low-capacitance cathode.
Document Details
- Document Type
- Technical Report
- Publication Date
- May 27, 1994
- Accession Number
- ADA279932
Entities
People
- C. A. Spindt
Organizations
- SRI International