InT1Sb for Long-Wavelength Infrared Photodetectors and Arrays
Abstract
A number of samples have been grown in the Intervac-EPI solid-source Molecular Beam Epitaxy (MBE) system since it was first commissioned in early May, 1994. The samples have consisted of both undoped and doped InSb, undoped InAs and various calibration layers such as n-type and p-type GaAs doping staircases. The different surface reconstructions and surfaces phase transitions have been investigated using Reflection High Energy Electron Diffraction (RHEED) . For example, InSb growth temperature is set relative to a c(4x4) to a(1x3) surface phase transition, corresponding to an actual surface temperature of 390 deg C. RHEED oscillations were observed for GaAs, InAs and InSb as this is particularly important for determining growth rates and III/V flux radio. The philosophy has been to determine system independent growth parameters so that the technology can be easily transferred to other growth systems.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jun 01, 1994
- Accession Number
- ADA280108
Entities
People
- Manijeh Razeghi
Organizations
- Northwestern University