Field Emitter Array RF Amplifier Development Project Phase One, Cathode Technology Development
Abstract
Fifth Quarterly R&D Status / Technical report for the Field Emitter Array RF Amplifier Development Project - Phase 1, Cathode Technology Development. Electrical tests of field emitter arrays fabricated at MCNC have demonstrated modulation of the anode current at 1 GHz. DC testing continues at an aggressive pace. The vacuum bonder and test system is installed. The test chamber has been outfitted for DC and RF testing, with feedthroughs rated for 5 kV at 1 A DC, and 700 V at 1 A for high frequencies. The test chamber routinely gives vacuum levels in the low 10-8 torr range with overnight bakeout. Developments in device processing continue. New techniques for deposition of thick oxide layers are under development. In-house chem-mechanical polishing of wafers for planarization is time-consuming, but has proven more successful than polishing by external vendors. Field emission, Cold cathode, RF Amplifier.
Document Details
- Document Type
- Technical Report
- Publication Date
- Apr 01, 1992
- Accession Number
- ADA280337
Entities
People
- Gary E. Mcguire
- William Palmer