Surface Processes in CVD Diamond Growth

Abstract

The work performed under this contract consisted of basic research with the objective of improving our understanding of the fundamental science of diamond chemical vapor deposition. The major areas of work were numerical modeling of CVD diamond growth; theoretical studies of growth mechanisms; in- situ diagnostics of gas-phase species during hot-filament diamond growth; ab initio calculations of surface migration on diamond; theoretical studies of transport issues and scaling law development; measurement of the open site fraction on a diamond surface H exposure

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Document Details

Document Type
Technical Report
Publication Date
Jan 01, 1993
Accession Number
ADA280964

Entities

People

  • David G. Goodwin

Organizations

  • California Institute of Technology

Tags

Communities of Interest

  • Materials and Manufacturing Processes

DTIC Thesaurus Topics

  • Boundary Layer
  • Chemical Reaction Properties
  • Chemical Reactions
  • Chemistry
  • Combustion
  • Engineering
  • Filaments
  • First Principles Calculations
  • Heat Of Activation
  • Hydrogen
  • Measurement
  • Mechanics
  • Migration
  • Scaling Laws
  • Single Crystals
  • Substrates
  • Transport Ships

Readers

  • Computational Modeling and Simulation
  • Molecular Photonics/Laser Physics
  • Thin Film Deposition Science.