Military Applications of Microelectromechanical Systems
Abstract
Microelectromechanical systems (MEMS) or, more broadly, microengineered systems are essentially small devices on the scale of a few millimeters or less. They are often made using variations on techniques used in fabricating electronics; silicon is etched to create very fine, often very flat, structures. However, instead of transistors and diodes, small motors, gears, and sensors are made. Other techniques such as deep X-ray (synchrotron) lithography, electric discharge machining, and acoustic laser etching are also employed, often to create three-dimensional structures. These and other techniques are touched upon in the body of this report.
Document Details
- Document Type
- Technical Report
- Publication Date
- Jan 01, 1993
- Accession Number
- ADA282470
Entities
People
- Keith W. Brendley
- Randall Steeb
Organizations
- RAND Corporation