Neural Networks Modeling for Yield Enhancement in Semiconductor Manufacturing
Abstract
Major tasks planned during the first period of the research project have been the analysis of data and evaluation of its statistical properties. Selection of feasible neural network architectures and their feasibility study have been pursued. Also, development of data manipulation software has been facilitated during the initial phase of the project work for the purpose of properly interfacing data with the neural network models
Document Details
- Document Type
- Technical Report
- Publication Date
- Jan 31, 1993
- Accession Number
- ADA282793
Entities
People
- Jacek M. Zurada
Organizations
- University of Louisville