The Fabrication of Ridge Waveguided Photonic Circuits with Chemically Assisted Ion Beam Etched Mirrors

Abstract

The fabrication of etched ridge waveguide based monolithically integrated photonic circuits is described. Etched mirrors are created at the same time as the etched ridge waveguides by means of a one-step two-level etch technique. Waveguides, Semiconductor lasers, Fabrication, Opto electronics, Photonics.

Open PDF

Document Details

Document Type
Technical Report
Publication Date
Aug 01, 1992
Accession Number
ADA283490

Entities

People

  • Michael A. Parker
  • Paul D. Swanson
  • Stuart I. Libby

Organizations

  • Cornell University

Tags

DTIC Thesaurus Topics

  • Circuits
  • Electronics
  • Electronics Laboratories
  • Fabrication
  • Ion Beams
  • Laser Diodes
  • Lasers
  • Metal-Semiconductor Junctions
  • Optical Waveguides
  • Photonic Devices
  • Photonic Integrated Circuits
  • Photonics
  • Power Electronics
  • Quantum Wells
  • Semiconductor Lasers
  • Semiconductors
  • Waveguides

Fields of Study

  • Physics

Readers

  • Integrated Circuit Design and Technology.
  • Optical Physics and Photonics.
  • Thin Film Deposition Science.

Technology Areas

  • Directed Energy
  • Microelectronics
  • Microelectronics - Graphene