Native-Oxide Defined Ring Contact for Low Threshold Vertical-Cavity Lasers
Abstract
Data are presented characterizing a new process for fabrication of vertical-cavity surface-emitting lasers based on the selective conversion of high Al composition epitaxial AlGaAs to a stable native oxide using wet oxidation. The native oxide is used to form a ring contact to the laser active region. The resulting laser active regions have dimensions of 8, 4, and 2 microns The lowest threshold laser is achieved with the 8-microns active region, with a minimum threshold current of 225-microns continuous wave at room temperature
Document Details
- Document Type
- Technical Report
- Publication Date
- Jul 04, 1994
- Accession Number
- ADA283861
Entities
People
- D. G. Deppe
- D. L. Huffaker
- K. Kumar
- T. J. Rogers
Organizations
- University of Texas at Austin